Accounting for the Complex Surface Structure in Ellipsometric Studies of the Effects of Magnetron Sputtering Modes on the Growth and Optical Properties of In2O3 Films
Crossref DOI link: https://doi.org/10.1007/s10812-018-0625-5
Published Online: 2018-03-29
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tikhii, A. A.
Nikolaenko, Yu. M.
Gritskih, V. A.
Svyrydova, K. A.
Murga, V. V.
Zhikhareva, Yu. I.
Zhikharev, I. V.
Text and Data Mining valid from 2018-03-01
Article History
Received: 6 July 2017
First Online: 29 March 2018