Attenuated Total Reflection Spectra of Nitrided SiO2/Si Structures
Crossref DOI link: https://doi.org/10.1007/s10812-022-01408-3
Published Online: 2022-09-12
Published Print: 2022-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Odzhaev, V. B.
Pyatlitski, A. N.
Prosolovich, V. S.
Kovalchuk, N. S.
Soloviev, Ya. A.
Zhygulin, D. V.
Shestovsky, D. V.
Yankovski, Yu. N.
Brinkevich, D. I.
Text and Data Mining valid from 2022-09-01
Version of Record valid from 2022-09-01
Article History
Received: 11 May 2022
First Online: 12 September 2022