IR Transmittance of Si/SiO2/Si3N4/Si Insular Structures Formed by Selective Laser Annealing
Crossref DOI link: https://doi.org/10.1007/s10812-022-01411-8
Published Online: 2022-09-12
Published Print: 2022-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mukhammad, A. I.
Gaiduk, P. I.
Nalivaiko, O. Yu.
Kolos, V. V.
Text and Data Mining valid from 2022-09-01
Version of Record valid from 2022-09-01
Article History
Received: 3 June 2022
First Online: 12 September 2022