Resistive Bridging Defect Detection in Bulk, FDSOI and FinFET Technologies
Crossref DOI link: https://doi.org/10.1007/s10836-017-5674-9
Published Online: 2017-06-29
Published Print: 2017-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Karel, Amit http://orcid.org/0000-0002-5651-2270
Comte, Mariane
Galliere, Jean-Marc
Azais, Florence
Renovell, Michel
License valid from 2017-06-29