Novel method for detection of mixed-type defect patterns in wafer maps based on a single shot detector algorithm
Crossref DOI link: https://doi.org/10.1007/s10845-021-01755-6
Published Online: 2021-03-18
Published Print: 2022-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Tae San
Lee, Jong Wook
Lee, Won Kyung
Sohn, So Young http://orcid.org/0000-0002-3958-2269
Funding for this research was provided by:
National Research Foundation of Korea (2020R1A2C2005026)
Text and Data Mining valid from 2021-03-18
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Article History
Received: 11 March 2020
Accepted: 2 March 2021
First Online: 18 March 2021