Optimizing semiconductor processing open tube furnace performance: comparative analysis of PI and Mamdani fuzzy-PI controllers
Crossref DOI link: https://doi.org/10.1007/s10845-022-01993-2
Published Online: 2022-07-26
Published Print: 2023-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Beccaro, Wesley http://orcid.org/0000-0001-6599-2344
Ramos, Carlos A. S.
Duarte, Silvio X.
Text and Data Mining valid from 2022-07-26
Version of Record valid from 2022-07-26
Article History
Received: 21 May 2020
Accepted: 7 July 2022
First Online: 26 July 2022
Declarations
:
: The authors declare that they have no conflict of interest.