A molecular-level analysis of gas-phase reactions in chemical vapor deposition of carbon from methane using a detailed kinetic model
Crossref DOI link: https://doi.org/10.1007/s10853-015-9709-2
Published Online: 2016-01-08
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hu, Chunxia
Li, Hejun
Zhang, Shouyang
Li, Wei
Funding for this research was provided by:
National Nature Science Foundation of China (51221001)
The Research Fund of State Key Laboratory of Solidification Processing (NWPU), China (85-TZ-2013)
Text and Data Mining valid from 2016-01-08