Synthesis and morphology control of diluted Si nanowire arrays by metal-assisted chemical etching and thermal oxidation based on nanosphere lithography
Crossref DOI link: https://doi.org/10.1007/s10853-017-0880-5
Published Online: 2017-02-09
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhou, Bukang
Li, Xinhua
Shi, Tongfei
Liu, Guangqiang
Cao, Huaxiang
Wang, Yuqi
Funding for this research was provided by:
National Natural Science Foundation of China (51472247, 51671182)
License valid from 2017-02-09