Piezoelectric ultra-sensitive aluminum nitride thin film on flexible aluminum substrate
Crossref DOI link: https://doi.org/10.1007/s10853-017-1566-8
Published Online: 2017-09-15
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bishara, H. http://orcid.org/0000-0002-1353-7742
Berger, S.
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