Diffusion induced residual stress in comb-type microaccelerometer structure
Crossref DOI link: https://doi.org/10.1007/s10854-014-2095-8
Published Online: 2014-06-21
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dutta, Shankar
Shaveta,
Imran, Md.
Pal, Ramjay
Bhan, R. K.
Text and Data Mining valid from 2014-06-21