Selective epitaxy growth of Si1−xGex layers for MOSFETs and FinFETs
Crossref DOI link: https://doi.org/10.1007/s10854-015-3123-z
Published Online: 2015-05-31
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Radamson, Henry H.
Kolahdouz, Mohammadreza
Text and Data Mining valid from 2015-05-31