Effect of substrate temperature and bias voltage on the properties in DC magnetron sputtered AlN films on glass substrates
Crossref DOI link: https://doi.org/10.1007/s10854-015-4125-6
Published Online: 2015-11-25
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, J.
Zhang, Q.
Yang, G. F.
Yao, C. J.
Li, Y. J.
Sun, R.
Zhao, J. L.
Gao, S. M.
Text and Data Mining valid from 2015-11-25