3-D surface stereometry studies of sputtered TiN thin films obtained at different substrate temperatures
Crossref DOI link: https://doi.org/10.1007/s10854-016-5774-9
Published Online: 2016-10-06
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Stach, Sebastian
Sapota, Wiktoria
Ţălu, Ştefan
Ahmadpourian, Azin
Luna, Carlos
Ghobadi, Nader
Arman, Ali http://orcid.org/0000-0003-1246-0453
Ganji, Mohsen
License valid from 2016-10-06