Study of electrical properties of hafnium oxide thin film based metal–insulator–metal capacitors: pre and post metallic annealing
Crossref DOI link: https://doi.org/10.1007/s10854-016-5783-8
Published Online: 2016-10-07
Published Print: 2016-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mangla, O.
Gupta, V.
License valid from 2016-10-07