The study of remote monitoring and real-time signal processing of the pulse generator for thin film coating
Crossref DOI link: https://doi.org/10.1007/s10854-016-5913-3
Published Online: 2016-10-25
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lin, Chern-Sheng
Fan, Zhen-Huan
Chen, Pei-Chi
Liang, Chen-Jui
Lin, Yue-Der
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (105-2221-E-035 -027)
License valid from 2016-10-25