Sputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: influences of substrate temperature and deposition power
Crossref DOI link: https://doi.org/10.1007/s10854-019-02480-w
Published Online: 2019-12-05
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Iqbal, A.
Walker, G.
Hold, L.
Fernandes, A.
Lacopi, A.
Mohd-Yasin, F. http://orcid.org/0000-0002-6030-7480
Text and Data Mining valid from 2019-12-05
Version of Record valid from 2019-12-05
Article History
Received: 7 August 2019
Accepted: 30 October 2019
First Online: 5 December 2019