One-Step Nanosecond-Laser Microstructuring, Sulfur-Hyperdoping, and Annealing of Silicon Surfaces in Liquid Carbon Disulfide
Crossref DOI link: https://doi.org/10.1007/s10946-017-9632-x
Published Online: 2017-04-06
Published Print: 2017-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Danilov, P. A.
Ionin, A. A.
Khmel’nitskii, R. A.
Kudryashov, S. I.
Mel’nik, N. N.
Van Luong, Nguyen
Saraeva, I. N.
Smirnov, N. A.
Rudenko, A. A.
Zayarny, D. A.
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