Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
Crossref DOI link: https://doi.org/10.1007/s10951-014-0381-1
Published Online: 2014-05-25
Published Print: 2015-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yugma, Claude
Blue, Jakey
Dauzère-Pérès, Stéphane
Obeid, Ali
Text and Data Mining valid from 2014-05-25