Takata, Shigeru http://orcid.org/0000-0001-6787-6777
Hattori, Masanari http://orcid.org/0000-0002-5482-0210
Funding for this research was provided by:
Japan Society for the Promotion of Science
Osaka Vacuum Ltd.
Article History
Received: 7 June 2021
Accepted: 20 June 2022
First Online: 13 July 2022