Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials
Crossref DOI link: https://doi.org/10.1007/s10967-020-07295-2
Published Online: 2020-07-30
Published Print: 2020-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gornushkin, I. B. http://orcid.org/0000-0002-9943-7848
Sennikov, P. G.
Kornev, R. A.
Polyakov, V. S.
Text and Data Mining valid from 2020-07-30
Version of Record valid from 2020-07-30
Article History
Received: 22 April 2020
First Online: 30 July 2020