Electron Probe Measurements of Oxide Film Thickness on Silicon Surfaces
Crossref DOI link: https://doi.org/10.1007/s11018-015-0824-x
Published Online: 2015-12-01
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gavrilenko, V. P.
Kuzin, A. Yu.
Mityukhlyaev, V. B.
Stepovich, M. A.
Todua, P. A.
Filippov, M. N.
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