Micro-Opto-Electro-Mechanical System Accelerometer Based on Coarse-Fine Processing of Fabry–Perot Interferometer Signals
Crossref DOI link: https://doi.org/10.1007/s11018-021-01869-6
Published Online: 2021-03-01
Published Print: 2021-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Busurin, V. I.
Korobkov, V. V.
Korobkov, K. A.
Koshevarova, N. A.
Text and Data Mining valid from 2021-02-01
Version of Record valid from 2021-02-01
Article History
Received: 3 June 2020
Accepted: 28 August 2020
First Online: 1 March 2021