Nano/micro-electro mechanical systems: a patent view
Crossref DOI link: https://doi.org/10.1007/s11051-015-3273-1
Published Online: 2015-11-30
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hu, Guangyuan
Liu, Weishu
Funding for this research was provided by:
National Natural Science Foundation of China (#71273030)
Shanghai Soft Science Key Project (#14692102900)
Text and Data Mining valid from 2015-11-30