A novel method to reduce the period limitation in laser interference lithography
Crossref DOI link: https://doi.org/10.1007/s11082-014-0113-y
Published Online: 2015-01-03
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dai, Longgui
Xuan, Mingdong
Ding, Peng
Jiang, Yang
Ma, Ziguang
Jia, Haiqiang
Wang, Wenxin
Zhou, Junming
Chen, Hong
Text and Data Mining valid from 2015-01-03