Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor
Crossref DOI link: https://doi.org/10.1007/s11090-016-9744-z
Published Online: 2016-08-30
Published Print: 2016-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hur, M.
Lee, J. O.
Lee, J. Y.
Kang, W. S.
Song, Y.-H.
License valid from 2016-08-30