The Radial Distribution of Ions and Electrons in RF Inductively Coupled H2/T2B Plasmas
Crossref DOI link: https://doi.org/10.1007/s11090-017-9858-y
Published Online: 2017-10-24
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ai, Xing
Chen, Guo
Zhang, Ling
Liu, Lei
He, Xiao-Shan
He, Zhi-Bing
Du, Kai
License valid from 2017-10-24