Hydrogen Reduction of MoF6 and Molybdenum Carbide Formation in RF Inductively Coupled Low-Pressure Discharge: Experiment and Equilibrium Thermodynamics Consideration
Crossref DOI link: https://doi.org/10.1007/s11090-020-10138-3
Published Online: 2020-11-12
Published Print: 2021-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sennikov, P. G.
Gornushkin, I. B.
Kornev, R. A.
Nazarov, V. V.
Polyakov, V. S.
Shkrunin, V. E.
Text and Data Mining valid from 2020-11-12
Version of Record valid from 2020-11-12
Article History
Received: 28 May 2020
Accepted: 2 November 2020
First Online: 12 November 2020