Three-Dimensional Two-Temperature Modeling of Ar Loop-Type Inductively Coupled Thermal Plasma for Surface Modification
Crossref DOI link: https://doi.org/10.1007/s11090-020-10144-5
Published Online: 2020-11-28
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ozeki, Genki
Tanaka, Yasunori
Sugiyama, Y
Nakano, Y
Ishijima, T
Uesugi, Y
Yukimoto, T
Kawaura, H
Text and Data Mining valid from 2020-11-28
Version of Record valid from 2020-11-28
Article History
Received: 12 August 2020
Accepted: 15 November 2020
First Online: 28 November 2020