Numerical Simulation and Experimental Investigation on Etching Process of Atmospheric Pressure Cold Plasma Jet with Shielding Gas
Crossref DOI link: https://doi.org/10.1007/s11090-021-10226-y
Published Online: 2022-01-04
Published Print: 2022-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lv, Li
Wang, Tao
Wang, Jia-Hao
Wang, Sheng-Quan
Shi, Li-Ping
Li, Meng
Chen, Si-Le
Tu, De-Yu
Text and Data Mining valid from 2022-01-04
Version of Record valid from 2022-01-04
Article History
Received: 22 September 2021
Accepted: 16 December 2021
First Online: 4 January 2022