Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure
Crossref DOI link: https://doi.org/10.1007/s11090-022-10276-w
Published Online: 2022-08-12
Published Print: 2022-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shabarova, L. V.
Kornev, R. A.
Ermakov, A. A.
Shkrunin, V. E.
Shishkin, A. I.
Belov, A. A.
Kalyasov, P. S.
Text and Data Mining valid from 2022-08-12
Version of Record valid from 2022-08-12
Article History
Received: 9 March 2022
Accepted: 10 July 2022
First Online: 12 August 2022