Study of the Electron Density in an Inductively Coupled Plasma of Fluorine-Hydrogen-Argon Gas Mixture
Crossref DOI link: https://doi.org/10.1007/s11090-022-10280-0
Published Online: 2022-08-24
Published Print: 2022-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sintsov, Sergey
Mansfeld, Dmitry
Preobrazhensky, Evgeny
Kornev, Roman
Chekamrev, Nikita
Viktorov, Mikhail
Ermakov, Artur
Vodopyanov, Alexander
Text and Data Mining valid from 2022-08-24
Version of Record valid from 2022-08-24
Article History
Received: 30 May 2022
Accepted: 11 August 2022
First Online: 24 August 2022