Funding for this research was provided by:
National Key R&D Program of China (2017YFA0303700)
National Natural Science Foundation of China (No. 61727801, 11974205)
National Natural Science Foundation of China (11774197)
Key R&D Program of Guangdong province (2018B030325002)
Tsinghua University Initiative Scientific Research Program
Beijing Advanced Innovation Center for Future Chip
Article History
Received: 3 April 2020
Accepted: 20 August 2020
First Online: 22 September 2020