Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films
Crossref DOI link: https://doi.org/10.1007/s11182-018-1524-1
Published Online: 2018-11-07
Published Print: 2018-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Malinovskaya, T. D.
Sachkov, V. I.
Sosnovskii, S. A.
Zhek, V. V.
Text and Data Mining valid from 2018-11-01
Article History
Received: 28 February 2018
Revised: 23 April 2018
First Online: 7 November 2018