Deposition of a Multilayer Coating in a Gas-Metal Beam-Plasma Formation at Low Pressure
Crossref DOI link: https://doi.org/10.1007/s11182-021-02310-9
Published Online: 2021-05-08
Published Print: 2021-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Denisov, V. V.
Denisova, Yu. A.
Vardanyan, E. L.
Ostroverkhov, E. V.
Leonov, A. A.
Savchuk, M. V.
Text and Data Mining valid from 2021-05-01
Version of Record valid from 2021-05-01
Article History
Received: 7 December 2020
First Online: 8 May 2021