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Numerical Simulation of Temperature Field Dynamics in Single-Crystal Silicon at Repetitively-Pulsed High-Intensity Ion Implantation and Energy Impact on the Surface Layer

Crossref DOI link: https://doi.org/10.1007/s11182-023-02843-1

Published Online: 2023-03-16

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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