Yang, Jin
Yang, Wangdong
Qi, Ruixuan
Tsai, Qinyun
Lin, Shengle
Dong, Fengkun
Li, Kenli
Li, Keqin
Funding for this research was provided by:
the Key Program of National Natural Science Foundation of China (U21A20461, 92055213, U21A20461, 92055213)
the Key Program of National Natural Science Foundation of China (U21A20461, 92055213, U21A20461, 92055213)
the Key Program of National Natural Science Foundation of China (U21A20461, 92055213, U21A20461, 92055213)
the National Key R &D Program of China (2021YFB0300800, 2021YFB0300800)
the National Key R &D Program of China (2021YFB0300800, 2021YFB0300800)
the National Key R &D Program of China (2021YFB0300800, 2021YFB0300800)
National Natural Science Foundation of China (61872127, 61872127, 61872127, 61872127)
National Natural Science Foundation of China (61872127, 61872127)
Key-Area Research and Development Program of Guangdong Province (2021B0101190004, 2021B0101190004)
Key-Area Research and Development Program of Guangdong Province (2021B0101190004, 2021B0101190004)
Key-Area Research and Development Program of Guangdong Province (2021B0101190004, 2021B0101190004)
Research on High Precision Numerical Simulation and Parallel Computing Method for Ion Implanted Silicon Carbide Semiconductor Doping Process (U21A20461, U21A20461)
Research on High Precision Numerical Simulation and Parallel Computing Method for Ion Implanted Silicon Carbide Semiconductor Doping Process (U21A20461, U21A20461)
Research on High Precision Numerical Simulation and Parallel Computing Method for Ion Implanted Silicon Carbide Semiconductor Doping Process (U21A20461, U21A20461)
Article History
Accepted: 31 May 2023
First Online: 24 June 2023
Declarations
:
: This material is the authors’ own original work, which has not been previously published elsewhere. The paper is not currently being considered for publication elsewhere. The paper reflects the authors’ own research and analysis in a truthful and complete manner.
: This article does not contain any studies with human participants or animals performed by any of the authors.
: Not applicable.
: Not applicable.