Tribocorrosion Study of Copper During Chemical Mechanical Polishing in Potassium Periodate-Based Slurry
Crossref DOI link: https://doi.org/10.1007/s11249-015-0474-9
Published Online: 2015-03-10
Published Print: 2015-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cheng, Jie
Wang, Tongqing
Chai, Zhimin
Lu, Xinchun
Text and Data Mining valid from 2015-03-10