Confining Liquids on Silicon Surfaces to Lubricate MEMS
Crossref DOI link: https://doi.org/10.1007/s11249-015-0541-2
Published Online: 2015-05-23
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Leong, Jonathan Y.
Zhang, Jie
Sinha, Sujeet K.
Holmes, Andrew
Spikes, Hugh
Reddyhoff, Tom
License valid from 2015-05-23