Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing
Crossref DOI link: https://doi.org/10.1007/s11340-019-00565-5
Published Online: 2019-12-09
Published Print: 2020-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, C.
Zhang, D.
Cheng, G.
Zhu, Y. http://orcid.org/0000-0002-3862-5757
Text and Data Mining valid from 2019-12-09
Version of Record valid from 2019-12-09
Article History
Received: 15 November 2018
Accepted: 19 November 2019
First Online: 9 December 2019