Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage
Crossref DOI link: https://doi.org/10.1007/s11424-018-7314-6
Published Online: 2019-04-29
Published Print: 2019-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gao, Jinhai
Hao, Lina
Cheng, Hongtai
Cao, Ruimin
Sun, Zhiyong
Text and Data Mining valid from 2019-04-29
Article History
Received: 26 September 2017
Revised: 7 May 2018
First Online: 29 April 2019