Outgassing analysis of molecular glass photoresists under EUV irradiation
Crossref DOI link: https://doi.org/10.1007/s11426-014-5122-y
Published Online: 2014-06-13
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Li
Xu, Jian
Yuan, Hua
Yang, ShuMin
Wang, LianSheng
Wu, YanQing
Zhao, Jun
Chen, Ming
Liu, HaiGang
Li, ShaYu
Tai, RenZhong
Wang, ShuangQing
Yang, GuoQiang
Text and Data Mining valid from 2014-06-13