Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes
Crossref DOI link: https://doi.org/10.1007/s11432-018-9593-1
Published Online: 2019-01-15
Published Print: 2019-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Zhao
Hu, Changhua
Hu, Jinwen
Text and Data Mining valid from 2019-01-15
Version of Record valid from 2019-01-15
Article History
Received: 16 May 2018
Accepted: 16 July 2018
First Online: 15 January 2019