Litho-AsymVnet: super-resolution lithography modeling with an asymmetric V-net architecture
Crossref DOI link: https://doi.org/10.1007/s11432-022-3755-y
Published Online: 2023-11-02
Published Print: 2023-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Qing
Zhang, Yuhang
Lu, Wei
Huang, Huajie
Zhong, Zheng
Zhou, Congshu
Li, Yongfu
Text and Data Mining valid from 2023-11-02
Version of Record valid from 2023-11-02
Article History
Received: 25 November 2022
Revised: 7 February 2023
Accepted: 5 May 2023
First Online: 2 November 2023