Optical and electrical properties of hydrogenated silicon oxide thin films deposited by PECVD
Crossref DOI link: https://doi.org/10.1007/s11595-014-1017-1
Published Online: 2014-10-04
Published Print: 2014-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shen, Hualong
Wang, Hui
Yan, Hui
Zhang, Ming
Pan, Qingtao
Jia, Haijun
Mai, Yaohua
Text and Data Mining valid from 2014-10-01