Mechanisms and Kinetics of Boron Removal from Silicon by Humidified Hydrogen
Crossref DOI link: https://doi.org/10.1007/s11663-015-0566-9
Published Online: 2015-12-29
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Safarian, Jafar
Tang, Kai
Olsen, Jan Erik
Andersson, Stefan
Tranell, Gabriella
Hildal, Kjetil
Text and Data Mining valid from 2015-12-29
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First Online: 29 December 2015