Study of Shallow Backside Junctions for Backside Illumination of CMOS Image Sensors
Crossref DOI link: https://doi.org/10.1007/s11664-014-3336-6
Published Online: 2014-08-14
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Choi, Chung Seok
Yeo, Sang Chul
Kim, Dohwan
Kim, Jongchae
Yoo, Kyung Dong
Lee, Hyuck Mo
Text and Data Mining valid from 2014-08-14