Plasma Etching of n-Type 4H-SiC for Photoconductive Semiconductor Switch Applications
Crossref DOI link: https://doi.org/10.1007/s11664-015-3658-z
Published Online: 2015-02-13
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ekinci, Huseyin
Kuryatkov, Vladimir V.
Mauch, Daniel L.
Dickens, James C.
Nikishin, Sergey A.
Text and Data Mining valid from 2015-02-13