Metal Gate (TiN, TiC, TaN) Film Stack Stress
Crossref DOI link: https://doi.org/10.1007/s11664-015-3897-z
Published Online: 2015-07-07
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bello, A.F.
Paul, Abhijeet
Kim, Hoon
Text and Data Mining valid from 2015-07-07