Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices
Crossref DOI link: https://doi.org/10.1007/s11664-016-4420-x
Published Online: 2016-03-04
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Qi
Liu, Hongyan
Li, Gen
Zeng, Fei
Pan, Feng
Luo, Jingting
Qian, Lirong
Funding for this research was provided by:
National Natural Science Foundation of China (51371103)
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