Analysis and Measurement of Residual Stress in Bridge Membrane MEMS Relays
Crossref DOI link: https://doi.org/10.1007/s11664-017-5323-1
Published Online: 2017-02-13
Published Print: 2017-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ruan, Yong
Wang, Weizhong
Zhu, Yong
You, Zheng
Funding for this research was provided by:
Ph.D. Programs Foundation of Ministry of Education of China (041503028)
Tsinghua University scientific research project (52300300916)
License valid from 2017-02-13